发明授权
- 专利标题: Three-dimensional measuring device and board inspection device
- 专利标题(中): 三维测量装置和板检测装置
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申请号: US12669433申请日: 2008-07-18
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公开(公告)号: US08436890B2公开(公告)日: 2013-05-07
- 发明人: Takahiro Mamiya
- 申请人: Takahiro Mamiya
- 申请人地址: JP Aichi
- 专利权人: CKD Corporation
- 当前专利权人: CKD Corporation
- 当前专利权人地址: JP Aichi
- 代理机构: Osha Liang LLP
- 优先权: JP2007-206112 20070808
- 国际申请: PCT/JP2008/062985 WO 20080718
- 国际公布: WO2009/019966 WO 20090212
- 主分类号: H04N13/00
- IPC分类号: H04N13/00
摘要:
A three-dimensional measuring device includes an irradiation means capable of irradiating a striped light pattern used for a spatial encoding method and a striped light pattern used for a phase shift method on a measurement object part on a board main body, an imaging means capable of imaging a measurement object part irradiated by the light pattern, an image control means for controlling imaging by the imaging means, a first calculation means for calculating a height of the measurement object part according to the phase shift method based on a multiplicity of image data imaged by the imaging means, and a second calculation means capable of using the spatial encoding method to identify a line corresponding to the measurement object part from among the image data at a time of calculation by the first calculation means by the phase shift method based on the image data.
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