发明授权
US08436890B2 Three-dimensional measuring device and board inspection device 有权
三维测量装置和板检测装置

  • 专利标题: Three-dimensional measuring device and board inspection device
  • 专利标题(中): 三维测量装置和板检测装置
  • 申请号: US12669433
    申请日: 2008-07-18
  • 公开(公告)号: US08436890B2
    公开(公告)日: 2013-05-07
  • 发明人: Takahiro Mamiya
  • 申请人: Takahiro Mamiya
  • 申请人地址: JP Aichi
  • 专利权人: CKD Corporation
  • 当前专利权人: CKD Corporation
  • 当前专利权人地址: JP Aichi
  • 代理机构: Osha Liang LLP
  • 优先权: JP2007-206112 20070808
  • 国际申请: PCT/JP2008/062985 WO 20080718
  • 国际公布: WO2009/019966 WO 20090212
  • 主分类号: H04N13/00
  • IPC分类号: H04N13/00
Three-dimensional measuring device and board inspection device
摘要:
A three-dimensional measuring device includes an irradiation means capable of irradiating a striped light pattern used for a spatial encoding method and a striped light pattern used for a phase shift method on a measurement object part on a board main body, an imaging means capable of imaging a measurement object part irradiated by the light pattern, an image control means for controlling imaging by the imaging means, a first calculation means for calculating a height of the measurement object part according to the phase shift method based on a multiplicity of image data imaged by the imaging means, and a second calculation means capable of using the spatial encoding method to identify a line corresponding to the measurement object part from among the image data at a time of calculation by the first calculation means by the phase shift method based on the image data.
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