发明授权
US08437071B2 Interferometric modulator array with integrated MEMS electrical switches
失效
具有集成MEMS电气开关的干涉式调制器阵列
- 专利标题： Interferometric modulator array with integrated MEMS electrical switches
- 专利标题（中）： 具有集成MEMS电气开关的干涉式调制器阵列
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申请号： US13528609申请日： 2012-06-20
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公开(公告)号： US08437071B2公开(公告)日： 2013-05-07
- 发明人: Clarence Chui
- 申请人： Clarence Chui
- 申请人地址： US CA San Diego
- 专利权人： QUALCOMM MEMS Technologies, Inc.
- 当前专利权人： QUALCOMM MEMS Technologies, Inc.
- 当前专利权人地址： US CA San Diego
- 代理机构： Knobbe Martens Olson & Bear LLP
- 主分类号： G02B26/00
- IPC分类号： G02B26/00 ; G02B26/02
摘要：
An array of display elements, such as interferometric modulators, is integrated with collapsible cavity microelectromechanical system (MEMS) electrical switches. The electrical switches and the display elements may be at least partially formed with the same manufacturing operations. The switches may form row or column select functions for the display elements.
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