Invention Grant
US08437071B2 Interferometric modulator array with integrated MEMS electrical switches
失效
具有集成MEMS电气开关的干涉式调制器阵列
- Patent Title: Interferometric modulator array with integrated MEMS electrical switches
- Patent Title (中): 具有集成MEMS电气开关的干涉式调制器阵列
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Application No.: US13528609Application Date: 2012-06-20
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Publication No.: US08437071B2Publication Date: 2013-05-07
- Inventor: Clarence Chui
- Applicant: Clarence Chui
- Applicant Address: US CA San Diego
- Assignee: QUALCOMM MEMS Technologies, Inc.
- Current Assignee: QUALCOMM MEMS Technologies, Inc.
- Current Assignee Address: US CA San Diego
- Agency: Knobbe Martens Olson & Bear LLP
- Main IPC: G02B26/00
- IPC: G02B26/00 ; G02B26/02
Abstract:
An array of display elements, such as interferometric modulators, is integrated with collapsible cavity microelectromechanical system (MEMS) electrical switches. The electrical switches and the display elements may be at least partially formed with the same manufacturing operations. The switches may form row or column select functions for the display elements.
Public/Granted literature
- US20120256819A1 INTERFEROMETRIC MODULATOR ARRAY WITH INTEGRATED MEMS ELECTRICAL SWITCHES Public/Granted day:2012-10-11
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