发明授权
US08438527B2 Original plate evaluation method, computer readable storage medium, and original plate manufacturing method 有权
原版评估方法,计算机可读存储介质和原版制版方法

Original plate evaluation method, computer readable storage medium, and original plate manufacturing method
摘要:
According to one embodiment, an original plate evaluation method is disclosed. The original plate includes a substrate and N patterns differing from one another in shape. The method includes selecting N1 patterns from the N patterns based on first criterion, obtaining measured values for the N1 patterns, performing a decision whether the obtained measured values satisfy first specification value, selecting N2 patterns from the N patterns based on second criterion, predicting shapes of transfer patterns corresponding to N2 patterns, performing a decision whether the predicted shapes satisfy second specification value, and evaluating the plate based on the decision.
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