发明授权
- 专利标题: Original plate evaluation method, computer readable storage medium, and original plate manufacturing method
- 专利标题(中): 原版评估方法,计算机可读存储介质和原版制版方法
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申请号: US13426965申请日: 2012-03-22
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公开(公告)号: US08438527B2公开(公告)日: 2013-05-07
- 发明人: Satomi Nakamura , Toshiya Kotani , Kazuhito Kobayashi , Akiko Mimotogi , Chikaaki Kodama
- 申请人: Satomi Nakamura , Toshiya Kotani , Kazuhito Kobayashi , Akiko Mimotogi , Chikaaki Kodama
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2011-184896 20110826
- 主分类号: G06F17/50
- IPC分类号: G06F17/50
摘要:
According to one embodiment, an original plate evaluation method is disclosed. The original plate includes a substrate and N patterns differing from one another in shape. The method includes selecting N1 patterns from the N patterns based on first criterion, obtaining measured values for the N1 patterns, performing a decision whether the obtained measured values satisfy first specification value, selecting N2 patterns from the N patterns based on second criterion, predicting shapes of transfer patterns corresponding to N2 patterns, performing a decision whether the predicted shapes satisfy second specification value, and evaluating the plate based on the decision.
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