发明授权
US08440504B2 Method for aligning and bonding elements and a device comprising aligned and bonded elements
有权
用于对准和结合元件的方法和包括对准和结合元件的装置
- 专利标题: Method for aligning and bonding elements and a device comprising aligned and bonded elements
- 专利标题(中): 用于对准和结合元件的方法和包括对准和结合元件的装置
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申请号: US12864871申请日: 2008-12-29
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公开(公告)号: US08440504B2公开(公告)日: 2013-05-14
- 发明人: Philippe Soussan , Wouter Ruythooren , Eric Beyne , Koen De Munck
- 申请人: Philippe Soussan , Wouter Ruythooren , Eric Beyne , Koen De Munck
- 申请人地址: BE Leuven
- 专利权人: IMEC
- 当前专利权人: IMEC
- 当前专利权人地址: BE Leuven
- 代理机构: Knobbe Martens Olson & Bear LLP
- 优先权: EP08150789 20080129
- 国际申请: PCT/EP2008/068328 WO 20081229
- 国际公布: WO2009/083582 WO 20090709
- 主分类号: H01L21/44
- IPC分类号: H01L21/44
摘要:
The present invention is related to a method for aligning and bonding a first element (1) and a second element (2), comprising: obtaining a first element (1) having at least one protrusion, the protrusion having a base portion (12) made of a first material and an upper portion (13) made of a second, deformable material, different from the first material; obtaining a second element (2) having a first main surface and second main surface (8) and at least one through-hole between the first and second main surface; placing the first and second element onto each other; receiving in the through-hole of the second element (2) the protrusion of the first element (1), the protrusion being arranged and constructed so as to extend from an opening of the through-hole in the first main surface to a position beyond an opening of the through-hole in the second main surface (8); deforming the deformable portion (13) of the protrusion, such that the deformed portion mechanically fixes the second element (2) on the first element (1).