发明授权
- 专利标题: Threshold adjustment for MOS devices by adapting a spacer width prior to implantation
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申请号: US13104474申请日: 2011-05-10
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公开(公告)号: US08440534B2公开(公告)日: 2013-05-14
- 发明人: Uwe Griebenow , Jan Hoentschel , Kai Frohberg , Heike Berthold , Katrin Reiche , Frank Feustel , Kerstin Ruttloff
- 申请人: Uwe Griebenow , Jan Hoentschel , Kai Frohberg , Heike Berthold , Katrin Reiche , Frank Feustel , Kerstin Ruttloff
- 申请人地址: US TX Austin
- 专利权人: Advanced Micro Devices, Inc.
- 当前专利权人: Advanced Micro Devices, Inc.
- 当前专利权人地址: US TX Austin
- 代理机构: Williams, Morgan & Amerson, P.C.
- 优先权: DE102008030856 20080630
- 主分类号: H01L21/336
- IPC分类号: H01L21/336 ; H01L21/8234
摘要:
Different threshold voltages of transistors of the same conductivity type in a complex integrated circuit may be adjusted on the basis of different Miller capacitances, which may be accomplished by appropriately adapting a spacer width and/or performing a tilted extension implantation. Thus, efficient process strategies may be available to controllably adjust the Miller capacitance, thereby providing enhanced transistor performance of low threshold transistors while not unduly contributing to process complexity compared to conventional approaches in which threshold voltage values may be adjusted on the basis of complex halo and well doping regimes.
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