发明授权
US08440977B2 Manufacturing method of radiation detecting apparatus, and radiation detecting apparatus and radiation imaging system
有权
放射线检测装置的制造方法以及放射线检测装置和放射线成像系统
- 专利标题： Manufacturing method of radiation detecting apparatus, and radiation detecting apparatus and radiation imaging system
- 专利标题（中）： 放射线检测装置的制造方法以及放射线检测装置和放射线成像系统
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申请号： US12676352申请日： 2008-11-04
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公开(公告)号： US08440977B2公开(公告)日： 2013-05-14
- 发明人: Takamasa Ishii , Chiori Mochizuki , Minoru Watanabe
- 申请人： Takamasa Ishii , Chiori Mochizuki , Minoru Watanabe
- 代理机构： Fitzpatrick, Cella, Harper & Scinto
- 优先权： JP2007-287402 20071105; JP2008-273193 20081023
- 国际申请： PCT/JP2008/070370 WO 20081104
- 国际公布： WO2009/060968 WO 20090514
- 主分类号： H01L27/146
- IPC分类号： H01L27/146
摘要：
The object of the invention is to realize a light radiation-detecting apparatus including a step of preparing a matrix array including a substrate, an insulating layer arranged on the substrate, a plurality of pixels arranged on the insulating layer, wherein the pixel includes a conversion element converting an incident radiation into an electric signal, and connection electrode arranged at a periphery of the plurality of pixels, fixing a flexible supporting member for covering the plurality of pixels to the matrix array at a side opposite to the substrate, and releasing the substrate from the matrix array.
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