发明授权
US08441046B2 Topside structures for an insulated gate bipolar transistor (IGBT) device to achieve improved device performances 有权
用于绝缘栅双极晶体管(IGBT)器件的顶部结构,以实现改进的器件性能

Topside structures for an insulated gate bipolar transistor (IGBT) device to achieve improved device performances
摘要:
This invention discloses an insulated gate bipolar transistor (IGBT) device formed in a semiconductor substrate. The IGBT device has a split-shielded trench gate that includes an upper gate segment and a lower shield segment. The IGBT device may further include a dummy trench filled with a dielectric layer disposed at a distance away from the split-shielded trench gate. The IGBT device further includes a body region extended between the split-shielded trench gate and the dummy trench encompassing a source region surrounding the split-shielded trench gate near a top surface of the semiconductor substrate. The IGBT device further includes a heavily doped N region disposed below the body region and above a source-dopant drift region above a bottom body-dopant collector region at a bottom surface of the semiconductor substrate. In an alternative embodiment, the IGBT may include a planar gate with a trench shield electrode.
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