发明授权
US08441046B2 Topside structures for an insulated gate bipolar transistor (IGBT) device to achieve improved device performances
有权
用于绝缘栅双极晶体管(IGBT)器件的顶部结构,以实现改进的器件性能
- 专利标题: Topside structures for an insulated gate bipolar transistor (IGBT) device to achieve improved device performances
- 专利标题(中): 用于绝缘栅双极晶体管(IGBT)器件的顶部结构,以实现改进的器件性能
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申请号: US12925869申请日: 2010-10-31
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公开(公告)号: US08441046B2公开(公告)日: 2013-05-14
- 发明人: Madhur Bobde , Anup Bhalla
- 申请人: Madhur Bobde , Anup Bhalla
- 申请人地址: US CA Sunnyvale
- 专利权人: Alpha and Omega Semiconductor Incorporated
- 当前专利权人: Alpha and Omega Semiconductor Incorporated
- 当前专利权人地址: US CA Sunnyvale
- 代理商 Bo-In Lin
- 主分类号: H01L29/66
- IPC分类号: H01L29/66
摘要:
This invention discloses an insulated gate bipolar transistor (IGBT) device formed in a semiconductor substrate. The IGBT device has a split-shielded trench gate that includes an upper gate segment and a lower shield segment. The IGBT device may further include a dummy trench filled with a dielectric layer disposed at a distance away from the split-shielded trench gate. The IGBT device further includes a body region extended between the split-shielded trench gate and the dummy trench encompassing a source region surrounding the split-shielded trench gate near a top surface of the semiconductor substrate. The IGBT device further includes a heavily doped N region disposed below the body region and above a source-dopant drift region above a bottom body-dopant collector region at a bottom surface of the semiconductor substrate. In an alternative embodiment, the IGBT may include a planar gate with a trench shield electrode.
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