发明授权
US08441060B2 Nonvolatile memory element and nonvolatile memory device incorporating nonvolatile memory element
有权
非易失性存储器元件和非易失性存储器件结合非易失性存储元件
- 专利标题: Nonvolatile memory element and nonvolatile memory device incorporating nonvolatile memory element
- 专利标题(中): 非易失性存储器元件和非易失性存储器件结合非易失性存储元件
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申请号: US12745599申请日: 2009-09-29
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公开(公告)号: US08441060B2公开(公告)日: 2013-05-14
- 发明人: Takeki Ninomiya , Koji Arita , Takumi Mikawa , Satoru Fujii
- 申请人: Takeki Ninomiya , Koji Arita , Takumi Mikawa , Satoru Fujii
- 申请人地址: JP Osaka
- 专利权人: Panasonic Corporation
- 当前专利权人: Panasonic Corporation
- 当前专利权人地址: JP Osaka
- 代理机构: McDermott Will & Emery LLP
- 优先权: JP2008-256027 20081001
- 国际申请: PCT/JP2009/004976 WO 20090929
- 国际公布: WO2010/038423 WO 20100408
- 主分类号: H01L29/792
- IPC分类号: H01L29/792
摘要:
A nonvolatile memory element includes a first electrode (103) formed on a substrate (101), a resistance variable layer (108) and a second electrode (107), wherein the resistance variable layer has a multi-layer structure including at least three layers which are a first transition metal oxide layer (104), a second transition metal oxide layer (106) which is higher in oxygen concentration than the first transition metal oxide layer (104), and a transition metal oxynitride layer (105). The second transition metal oxide layer (106) is in contact with either one of the first electrode (103) and the second electrode (107). The transition metal oxynitride layer (105) is provided between the first transition metal oxide layer (104) and the second transition metal oxide layer (106).
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