发明授权
- 专利标题: Multi-beam interferometer displacement measuring system utilized in a large measuring range
- 专利标题(中): 多光束干涉仪位移测量系统用于大量程
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申请号: US12926697申请日: 2010-12-06
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公开(公告)号: US08441649B2公开(公告)日: 2013-05-14
- 发明人: Yung-Cheng Wang , Lih-Horng Shyu , Chung-Ping Chang , Pi-Cheng Tung
- 申请人: Yung-Cheng Wang , Lih-Horng Shyu , Chung-Ping Chang , Pi-Cheng Tung
- 申请人地址: TW Douliou, Yunlin County
- 专利权人: National Yunlin University of Science and Technology
- 当前专利权人: National Yunlin University of Science and Technology
- 当前专利权人地址: TW Douliou, Yunlin County
- 代理机构: Bacon & Thomas, PLLC
- 优先权: TW98144696A 20091224
- 主分类号: G01B9/02
- IPC分类号: G01B9/02
摘要:
A multi-beam interferometer displacement measuring system has a light source module, a resonator module and a detecting device. The light source module has an emitter and a polaroid sheet. The emitter emits a non-polarizing beam. The polaroid sheet receives and transforms the non-polarizing beam into a polarizing beam. The resonator module receives the polarizing beam and has a coated glass panel, a corner cube prism and a wave-delay plate. The coated glass panel receives and reflects the polarizing beam. The corner cube prism receives and reflects the polarizing beam to the coated glass panel to form a resonant cavity. The wave-delay plate is mounted between the coated glass panel and the corner cube prism to receive the polarizing beam. The detecting device faces the coated glass panel to receive the interferential stripes formed in the resonator module and has a polarizing beam splitter, two power detectors and a signal processor.
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