Invention Grant
US08441773B2 Electronic element, variable capacitor, micro switch, method for driving micro switch, and MEMS type electronic element 有权
电子元件,可变电容器,微动开关,微动开关的驱动方法和MEMS型电子元件

Electronic element, variable capacitor, micro switch, method for driving micro switch, and MEMS type electronic element
Abstract:
Driving is made possible in a moving range equivalent to or wider than the conventional range, with a driving voltage having a range smaller than a pull-in voltage. An electronic element includes a fixed portion provided with a first driving electrode and a first signal electrode, and a movable portion provided with a second driving electrode and a second signal electrode, movable with respect to the fixed portion and provided to generate a spring force to make restoration to a predetermined position. An electrostatic force is generated between the first and second driving electrodes by a voltage applied therebetween so that the electrostatic force resists against the spring force; and the first and second driving electrodes and the first and second signal electrodes are arranged so that the electrostatic force is generated in a direction in which a spacing distance between the first and second signal electrodes is widened.
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