Invention Grant
- Patent Title: Method of producing coated member
- Patent Title (中): 生产涂层部件的方法
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Application No.: US13117576Application Date: 2011-05-27
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Publication No.: US08445077B2Publication Date: 2013-05-21
- Inventor: Masahiro Suzuki , Toshiyuki Saito , Kazuyoshi Yamakawa
- Applicant: Masahiro Suzuki , Toshiyuki Saito , Kazuyoshi Yamakawa
- Applicant Address: JP Osaka
- Assignee: JTEKT Corporation
- Current Assignee: JTEKT Corporation
- Current Assignee Address: JP Osaka
- Agency: Oliff & Berridge, PLC
- Priority: JP2010-124554 20100531
- Main IPC: H05H1/24
- IPC: H05H1/24

Abstract:
A method of producing a coated member in which a base material surface is at least partially coated with a diamond-like carbon film, the method includes: a diamond-like carbon film deposition process in which a diamond-like carbon film is formed on a surface of the base material by generating plasma by applying voltage to the base material in a processing chamber that stores the base material, while evacuating the processing chamber and introducing feedstock gas that contains at least a carbon compound into the processing chamber; and a hydrogenation process in which the deposited diamond-like carbon film is hydrogenated using hydrogen gas by stopping the voltage application and introducing hydrogen gas inducted instead of the feedstock gas, while the evacuation is being continued.
Public/Granted literature
- US20110293855A1 METHOD OF PRODUCING COATED MEMBER Public/Granted day:2011-12-01
Information query
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