发明授权
US08445378B2 Method of manufacturing a CMOS device including molecular storage elements in a via level 有权
制造包括通孔级分子存储元件的CMOS器件的方法

Method of manufacturing a CMOS device including molecular storage elements in a via level
摘要:
Memory cells in integrated circuit devices may be formed on the basis of functional molecules which may be positioned within via openings on the basis of appropriate patterning techniques, which may also be used for forming semiconductor-based integrated circuits. Consequently, memory cells may be formed on a “molecular” level without requiring extremely sophisticated patterning regimes, such as electron beam lithography and the like.
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