Invention Grant
US08450128B2 Method for producing semiconductor optical device and semiconductor optical device
有权
半导体光学器件和半导体光学器件的制造方法
- Patent Title: Method for producing semiconductor optical device and semiconductor optical device
- Patent Title (中): 半导体光学器件和半导体光学器件的制造方法
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Application No.: US13267952Application Date: 2011-10-07
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Publication No.: US08450128B2Publication Date: 2013-05-28
- Inventor: Hideki Yagi , Hiroyuki Yoshinaga
- Applicant: Hideki Yagi , Hiroyuki Yoshinaga
- Applicant Address: JP Osaka
- Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee Address: JP Osaka
- Agency: Smith, Gambrell & Russell, LLP
- Priority: JP2010-234754 20101019
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method for producing a semiconductor optical device includes the steps of forming a semiconductor region including a ridge structure on a substrate; forming an insulating film on the semiconductor region; forming a non-photosensitive resin region on the insulating film, forming a first mask that defines a scribe area; forming the scribe area by etching using the first mask; after removing the first mask, forming an insulating layer by etching the insulating film, forming an electrode on the ridge structure and the non-photosensitive resin region to produce a substrate product; forming a scribe line on a surface of the semiconductor region in the scribe area of the substrate product; and cutting the product along the scribe line to form a semiconductor laser bar.
Public/Granted literature
- US20120094415A1 METHOD FOR PRODUCING SEMICONDUCTOR OPTICAL DEVICE AND SEMICONDUCTOR OPTICAL DEVICE Public/Granted day:2012-04-19
Information query
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