发明授权
US08450715B2 Nonvolatile metal oxide memory element and nonvolatile memory device
有权
非挥发性金属氧化物存储元件和非易失性存储器件
- 专利标题: Nonvolatile metal oxide memory element and nonvolatile memory device
- 专利标题(中): 非挥发性金属氧化物存储元件和非易失性存储器件
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申请号: US12884000申请日: 2010-09-16
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公开(公告)号: US08450715B2公开(公告)日: 2013-05-28
- 发明人: Kensuke Takano , Katsuyuki Sekine , Yoshio Ozawa , Ryota Fujitsuka , Mitsuru Sato
- 申请人: Kensuke Takano , Katsuyuki Sekine , Yoshio Ozawa , Ryota Fujitsuka , Mitsuru Sato
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Tokyo
- 代理机构: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- 优先权: JP2009-216888 20090918
- 主分类号: H01L45/00
- IPC分类号: H01L45/00
摘要:
According to one embodiment, a nonvolatile memory device includes a plurality of nonvolatile memory elements each of that includes a resistance change film. The resistance change film is capable of recording information by transitioning between a plurality of states having different resistances in response to at least one of a voltage applied to the resistance change film or a current passed through the resistance change film, and the resistance change film includes an oxide containing at least one element selected from the group consisting of Hf, Zr, Ni, Ta, W, Co, Al, Fe, Mn, Cr, and Nb. An impurity element contained in the resistance change film is at least one element selected from the group consisting of Mg, Ca, Sr, Ba, Sc, Y, La, V, Ta, B, Ga, In, Tl, C, Si, Ge, Sn, Pb, N, P, As, Sb, Bi, S, Se, and Te, and the impurity element has an absolute value of standard Gibbs energy of oxide formation larger than an absolute value of standard Gibbs energy of oxide formation of the element contained in the oxide.
公开/授权文献
- US20110068316A1 NONVOLATILE MEMORY ELEMENT AND NONVOLATILE MEMORY DEVICE 公开/授权日:2011-03-24