Invention Grant
US08451016B2 Device and method for testing magnetic switches at wafer-level stage of manufacture
有权
在晶圆级制造阶段测试磁性开关的装置和方法
- Patent Title: Device and method for testing magnetic switches at wafer-level stage of manufacture
- Patent Title (中): 在晶圆级制造阶段测试磁性开关的装置和方法
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Application No.: US12650257Application Date: 2009-12-30
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Publication No.: US08451016B2Publication Date: 2013-05-28
- Inventor: Ravi Shankar , Olivier Le Neel
- Applicant: Ravi Shankar , Olivier Le Neel
- Applicant Address: SG Singapore
- Assignee: STMicroelectronics Pte Ltd.
- Current Assignee: STMicroelectronics Pte Ltd.
- Current Assignee Address: SG Singapore
- Agency: Seed IP Law Group PLLC
- Main IPC: G01R31/20
- IPC: G01R31/20 ; G01R31/00 ; G01R1/073

Abstract:
A testing mechanism for testing magnetically operated microelectromechanical system (MEMS) switches at a wafer level stage of manufacture includes an electromagnetic fixture configured to be received in a standard probe ring. The electromagnetic fixture is rotatable, relative to the probe ring, to permit adjustment of orientation of a generated magnetic field relative to the MEMS devices of a subject wafer. The testing mechanism also includes a probe card with probes positioned to contact test pads on the subject wafer. During operation, the probe card is positioned over the wafer to be tested, with the test probes in electrical contact with respective contact pads of the wafer, and the electromagnetic fixture is positioned above the probe card. An electrical potential is applied across the switches on the subject wafer, and the electromagnetic fixture is energized at selected levels of power and duration. Current flow across each switch is measured to determine one or more of: open circuit contact resistance, closed circuit contact resistance, response time, response to switching magnetic field, frequency response, current capacity, critical dimensions, critical angles of magnetic field orientation, etc. Wafer level testing enables rejection of non-compliant switches before the cutting and packaging levels of manufacture.
Public/Granted literature
- US20110156712A1 DEVICE AND METHOD FOR TESTING MAGNETIC SWITCHES AT WAFER-LEVEL STAGE OF MANUFACTURE Public/Granted day:2011-06-30
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