Invention Grant
- Patent Title: Micromechanical structure and method for operating a micromechanical structure
- Patent Title (中): 微机械结构的微机械结构和操作方法
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Application No.: US12924756Application Date: 2010-10-05
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Publication No.: US08453502B2Publication Date: 2013-06-04
- Inventor: Daniel Christoph Meisel
- Applicant: Daniel Christoph Meisel
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102009045431 20091007
- Main IPC: G01C19/56
- IPC: G01C19/56

Abstract:
A micromechanical yaw rate sensor includes a substrate having a main plane of extension and two Coriolis elements. The first Coriolis element may be driven to a first vibration along a second direction which is parallel to the main plane of extension. The second Coriolis element may be driven to a second vibration which is antiparallel to the first vibration. A first deflection of the first Coriolis element and a second deflection of the second Coriolis element, in each case along a first direction which is parallel to the main plane of extension and perpendicular to the second direction, may be detected. The micromechanical sensor also has a rocker element indirectly or directly coupled to the first Coriolis element and to the second Coriolis element, which rocker element has a torsional axis essentially parallel to the second direction.
Public/Granted literature
- US20110079080A1 Micromechanical structure and method for operating a micromechanical structure Public/Granted day:2011-04-07
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