发明授权
US08453503B2 Vibrating reed, vibrator, physical quantity sensor, and electronic apparatus 有权
振动簧片,振动器,物理量传感器和电子设备

Vibrating reed, vibrator, physical quantity sensor, and electronic apparatus
摘要:
A resonator element includes: drive beams including a first beam and a second beam that vibrate in torsional vibration modes and are elongated side by side in a first direction; support parts that couple one ends and the other ends of the first beam and the second beam; and detection arms elongated from the respective first beam and second beam in a second direction orthogonal to the first direction in a plan view, wherein, in a drive mode, the first beam and the second beam torsionally vibrate in opposite directions to each other, the respective detection arms vibrate in a normal direction of a plane containing the first direction and the second direction, and the detection arm elongated from the first beam and the detection arm elongated from the second beam vibrate in the same direction as each other.
信息查询
0/0