发明授权
US08454230B2 Method and system for indirect determination of local irradiance in an optical system
有权
用于间接确定光学系统中局部辐照度的方法和系统
- 专利标题： Method and system for indirect determination of local irradiance in an optical system
- 专利标题（中）： 用于间接确定光学系统中局部辐照度的方法和系统
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申请号： US12706422申请日： 2010-02-16
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公开(公告)号： US08454230B2公开(公告)日： 2013-06-04
- 发明人: Frank Melzer , Axel Scholz
- 申请人： Frank Melzer , Axel Scholz
- 申请人地址： DE Oberkochen
- 专利权人： Carl Zeiss SMT GmbH
- 当前专利权人： Carl Zeiss SMT GmbH
- 当前专利权人地址： DE Oberkochen
- 代理机构： Fish & Richardson P.C.
- 优先权： DE102005004460 20050201
- 主分类号： G01K7/00
- IPC分类号： G01K7/00 ; G01J5/00
摘要：
The invention concerns a method for the indirect determination of local irradiance in an optical system; wherein the optical system comprises optical elements between which an illuminated beam path is formed and a measurement object which absorbs the radiation in the beam path at least partially is positioned in a partial region of the beam path selected for the locally-resolved determination of the irradiance and the temperature distribution of at least one part of the measurement object is determined by means of a temperature detector.
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