Invention Grant
- Patent Title: Gas field ion microscopes having multiple operation modes
- Patent Title (中): 具有多种工作模式的气体离子显微镜
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Application No.: US13276879Application Date: 2011-10-19
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Publication No.: US08455840B2Publication Date: 2013-06-04
- Inventor: Lawrence Scipioni
- Applicant: Lawrence Scipioni
- Applicant Address: US NY Thornwood
- Assignee: Carl Zeiss Microscopy, LLC
- Current Assignee: Carl Zeiss Microscopy, LLC
- Current Assignee Address: US NY Thornwood
- Agency: Fish & Richardson P.C.
- Main IPC: H01J27/26
- IPC: H01J27/26 ; H01J27/02 ; H01J37/26 ; H01J49/10
Abstract:
The disclosure relates to ion beams systems, such as gas field ion microscopes, having multiple modes of operation, as well as related methods. In some embodiments, the disclosure provides a method of operating a gas field ion microscope system that includes a gas field ion source, where the gas field ion source includes a tip including a plurality of atoms.
Public/Granted literature
- US20120068067A1 GAS FIELD ION MICROSCOPES HAVING MULTIPLE OPERATION MODES Public/Granted day:2012-03-22
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