发明授权
- 专利标题: Programmable fuse
- 专利标题(中): 可编程保险丝
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申请号: US13466986申请日: 2012-05-08
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公开(公告)号: US08455977B2公开(公告)日: 2013-06-04
- 发明人: Wei Xia , Xiangdong Chen , Akira Ito
- 申请人: Wei Xia , Xiangdong Chen , Akira Ito
- 申请人地址: US CA Irvine
- 专利权人: Broadcom Corporation
- 当前专利权人: Broadcom Corporation
- 当前专利权人地址: US CA Irvine
- 代理机构: Farjami & Farjami LLP
- 主分类号: H01L29/00
- IPC分类号: H01L29/00
摘要:
According to one exemplary embodiment, a method for forming a one-time programmable metal fuse structure includes forming a metal fuse structure over a substrate, the metal fuse structure including a gate metal segment situated between a dielectric segment and a polysilicon segment, a gate metal fuse being formed in a portion of the gate metal segment. The method further includes doping the polysilicon segment so as to form first and second doped polysilicon portions separated by an undoped polysilicon portion where, in one embodiment, the gate metal fuse is substantially co-extensive with the undoped polysilicon portion. The method can further include forming a first silicide segment on the first doped polysilicon portion and a second silicide segment on the second doped polysilicon portion, where the first and second silicide segments form respective terminals of the one-time programmable metal fuse structure.
公开/授权文献
- US20120217613A1 Programmable Fuse 公开/授权日:2012-08-30
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