Invention Grant
- Patent Title: Piezoelectric sensor and method for making the same
- Patent Title (中): 压电传感器及其制作方法
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Application No.: US12886751Application Date: 2010-09-21
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Publication No.: US08456067B2Publication Date: 2013-06-04
- Inventor: Xiang-Ming He , Wei-Hua Pu , Li Wang , Jian-Jun Li , Jian Gao , Jian-Guo Ren
- Applicant: Xiang-Ming He , Wei-Hua Pu , Li Wang , Jian-Jun Li , Jian Gao , Jian-Guo Ren
- Applicant Address: CN Beijing TW New Taipei
- Assignee: Tsinghua University,Hon Hai Precision Industry Co., Ltd.
- Current Assignee: Tsinghua University,Hon Hai Precision Industry Co., Ltd.
- Current Assignee Address: CN Beijing TW New Taipei
- Agency: Altis Law Group, Inc.
- Priority: CN200910188417 20091124
- Main IPC: H01L41/193
- IPC: H01L41/193

Abstract:
The present disclosure relates to a piezoelectric sensor. The piezoelectric sensor includes a polymer layer, a first metal layer, and a second metal layer. The polymer layer includes pyrolytic polyacrylonitrile. The first metal layer is located on a surface of the polymer layer. The first metal layer includes a first work function. The second metal layer is located on another surface of the polymer layer and includes a second work function different from the first work function. The present disclosure also relates to a method for making the piezoelectric sensor.
Public/Granted literature
- US20110121688A1 PIEZOELECTRIC SENSOR AND METHOD FOR MAKING THE SAME Public/Granted day:2011-05-26
Information query
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