Invention Grant
US08460435B2 Apparatus for producing high-concentration ozone gas and method of producing high-concentration ozone gas 有权
高浓度臭氧气体的制造装置及高浓度臭氧气体的制造方法

Apparatus for producing high-concentration ozone gas and method of producing high-concentration ozone gas
Abstract:
An apparatus for producing high-concentration ozone gas has a plurality of adsorption/desorption columns and a plurality of valves capable of switching opening/closing of the passage of gas flowing into or out of the adsorption/desorption columns, such that each of the adsorption/desorption columns can performs ozone adsorption processing, evacuation processing or desorption processing. At least two of the adsorption/desorption columns are placed in a serial cycle arrangement to constitute a main adsorption/desorption column group, and one or more of the other adsorption/desorption columns is placed in parallel with the main adsorption/desorption column group to constitute an auxiliary adsorption/desorption column. The auxiliary adsorption/desorption column performs desorption processing during a period in which none of the adsorption/desorption columns of the main adsorption/desorption column group is performing desorption processing.
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