Invention Grant
- Patent Title: Apparatus for producing high-concentration ozone gas and method of producing high-concentration ozone gas
- Patent Title (中): 高浓度臭氧气体的制造装置及高浓度臭氧气体的制造方法
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Application No.: US12745595Application Date: 2008-11-28
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Publication No.: US08460435B2Publication Date: 2013-06-11
- Inventor: Yoichiro Tabata , Yujiro Okihara , Tetsuya Saitsu , Noriyuki Nakamura , Ryohei Ueda , Koji Ota , Yasuhiro Tanimura
- Applicant: Yoichiro Tabata , Yujiro Okihara , Tetsuya Saitsu , Noriyuki Nakamura , Ryohei Ueda , Koji Ota , Yasuhiro Tanimura
- Applicant Address: JP Tokyo JP Tokyo
- Assignee: Toshiba Mitsubishi-Electric Industrial Systems Corporation,Mitsubishi Electric Corporation
- Current Assignee: Toshiba Mitsubishi-Electric Industrial Systems Corporation,Mitsubishi Electric Corporation
- Current Assignee Address: JP Tokyo JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2007-311121 20071130
- International Application: PCT/JP2008/071705 WO 20081128
- International Announcement: WO2009/069774 WO 20090604
- Main IPC: C01B13/10
- IPC: C01B13/10 ; B01D53/04

Abstract:
An apparatus for producing high-concentration ozone gas has a plurality of adsorption/desorption columns and a plurality of valves capable of switching opening/closing of the passage of gas flowing into or out of the adsorption/desorption columns, such that each of the adsorption/desorption columns can performs ozone adsorption processing, evacuation processing or desorption processing. At least two of the adsorption/desorption columns are placed in a serial cycle arrangement to constitute a main adsorption/desorption column group, and one or more of the other adsorption/desorption columns is placed in parallel with the main adsorption/desorption column group to constitute an auxiliary adsorption/desorption column. The auxiliary adsorption/desorption column performs desorption processing during a period in which none of the adsorption/desorption columns of the main adsorption/desorption column group is performing desorption processing.
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