发明授权
- 专利标题： Organic layer deposition apparatus, and method of manufacturing organic light-emitting display apparatus using the same
- 专利标题（中）： 有机层沉积装置及使用其的有机发光显示装置的制造方法
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申请号： US13244110申请日： 2011-09-23
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公开(公告)号： US08461058B2公开(公告)日： 2013-06-11
- 发明人: Valeriy Prushinskiy , Len Kaplan , Se-Ho Cheong , Won-Sik Hyun , Heung-Yeol Na , Kyong-Tae Park , Byoung-Seong Jeong , Yong-Sup Choi
- 申请人： Valeriy Prushinskiy , Len Kaplan , Se-Ho Cheong , Won-Sik Hyun , Heung-Yeol Na , Kyong-Tae Park , Byoung-Seong Jeong , Yong-Sup Choi
- 申请人地址： KR Yongin-si
- 专利权人： Samsung Display Co., Ltd.
- 当前专利权人： Samsung Display Co., Ltd.
- 当前专利权人地址： KR Yongin-si
- 代理机构： Christie, Parker & Hale, LLP
- 优先权： KR10-2010-0103677 20101022
- 主分类号： H01L21/469
- IPC分类号： H01L21/469 ; H01L21/31 ; H01L21/00 ; H01L51/30
摘要：
An organic layer deposition apparatus including an electrostatic chuck combined with a substrate so as to fixedly support the substrate. The organic layer deposition apparatus including a receiving surface that has a set curvature for receiving the substrate; a deposition source for discharging a deposition material toward the substrate; a deposition source nozzle unit disposed at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; and a patterning slit sheet disposed to face the deposition source nozzle unit, and having a plurality of patterning slits arranged in a second direction perpendicular to the first direction, wherein a cross section of the patterning slit sheet on a plane formed by lines extending in the second direction and a third direction is bent by a set degree, wherein the third direction is perpendicular to the first and second directions.
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