发明授权
- 专利标题： Quartz boat method and apparatus for thin film thermal treatment
- 专利标题（中）： 用于薄膜热处理的石英舟法和设备
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申请号： US13171089申请日： 2011-06-28
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公开(公告)号： US08461061B2公开(公告)日： 2013-06-11
- 发明人: Paul Alexander , Jurg Schmitzberger , Ashish Tandon , Robert D. Wieting
- 申请人： Paul Alexander , Jurg Schmitzberger , Ashish Tandon , Robert D. Wieting
- 申请人地址： US CA San Jose
- 专利权人： Stion Corporation
- 当前专利权人： Stion Corporation
- 当前专利权人地址： US CA San Jose
- 代理机构： Kilpatrick Townsend & Stockton LLP
- 主分类号： H01L21/00
- IPC分类号： H01L21/00
摘要：
A method of supporting a plurality of planar substrates in a tube shaped furnace for conducting a thermal treatment process is disclosed. The method uses a boat fixture having a base frame including two length portions and a first width portion, a second width portion, and one or more middle members connected between the two length portions. Additionally, the method includes mounting a removable first grooved rod respectively on the first width portion, the second width portion, and each of the one or more middle members, each first grooved rod having a first plurality of grooves characterized by a first spatial configuration. The method further includes inserting one or two substrates of a plurality of planar substrates into each groove in the boat fixture separated by a distance.