Invention Grant
US08461833B2 Method for determining the sensitivity of an acceleration sensor or magnetic field sensor 有权
用于确定加速度传感器或磁场传感器的灵敏度的方法

Method for determining the sensitivity of an acceleration sensor or magnetic field sensor
Abstract:
A method for determining the sensitivity of a sensor provides the following steps: a) first and second deflection voltages are applied to first and second electrode systems of the sensor, respectively, and first and second electrostatic forces are exerted on an elastically suspended seismic mass of the sensor by the first and second electrode systems, respectively, and a restoring force is exerted on the mass as a result of the elasticity of the mass, and a force equilibrium is established among the first and second electrostatic forces and the restoring force, and the mass assumes a deflection position characteristic of the force equilibrium, and an output signal characteristic of the force equilibrium and of the deflection position is measured; and b) the sensitivity of the sensor is computed on the basis of the first and second deflection voltages.
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