Invention Grant
US08461833B2 Method for determining the sensitivity of an acceleration sensor or magnetic field sensor
有权
用于确定加速度传感器或磁场传感器的灵敏度的方法
- Patent Title: Method for determining the sensitivity of an acceleration sensor or magnetic field sensor
- Patent Title (中): 用于确定加速度传感器或磁场传感器的灵敏度的方法
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Application No.: US12927259Application Date: 2010-11-09
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Publication No.: US08461833B2Publication Date: 2013-06-11
- Inventor: Johannes Classen , Arnd Kaelberer , Hans-Joerg Faisst , Axel Franke , Mirko Hattass , Holger Rank , Robert Sattler , Alexander Buhmann , Ramona Maas , Marian Keck
- Applicant: Johannes Classen , Arnd Kaelberer , Hans-Joerg Faisst , Axel Franke , Mirko Hattass , Holger Rank , Robert Sattler , Alexander Buhmann , Ramona Maas , Marian Keck
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102009046807 20091118
- Main IPC: G01R33/02
- IPC: G01R33/02 ; G01R33/00

Abstract:
A method for determining the sensitivity of a sensor provides the following steps: a) first and second deflection voltages are applied to first and second electrode systems of the sensor, respectively, and first and second electrostatic forces are exerted on an elastically suspended seismic mass of the sensor by the first and second electrode systems, respectively, and a restoring force is exerted on the mass as a result of the elasticity of the mass, and a force equilibrium is established among the first and second electrostatic forces and the restoring force, and the mass assumes a deflection position characteristic of the force equilibrium, and an output signal characteristic of the force equilibrium and of the deflection position is measured; and b) the sensitivity of the sensor is computed on the basis of the first and second deflection voltages.
Public/Granted literature
- US20110140692A1 Method for determining the sensitivity of an acceleration sensor or magnetic field sensor Public/Granted day:2011-06-16
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