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US08463082B2 Manufacturing method for electrooptic element and optical deflector including electrooptic element 有权
包括电光元件的电光元件和光偏转器的制造方法

Manufacturing method for electrooptic element and optical deflector including electrooptic element
摘要:
An electrooptic element includes an optical waveguide layer made from a ferroelectric material and having a polarization inverted region of a predetermined shape having an optical incidence face and an optical exit face, and an upper electrode layer and a lower electrode layer formed on a top face and a bottom face of the optical waveguide layer, respectively, in which the ferroelectric material is magnesium-oxide-doped lithium niobate, and at least one of the optical incidence face and the optical exit face of the optical waveguide layer is formed in parallel with a crystal face of the ferroelectric material.
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