发明授权
US08463116B2 Systems for curing deposited material using feedback control 有权
使用反馈控制固化沉积材料的系统

Systems for curing deposited material using feedback control
摘要:
Systems are provided for curing a deposited curable material film using a light source and feedback system for monitoring the degree of curing using detected optical properties of the film. Operational parameters of the light source (e.g., power) are adjusted by a control system in response to the detected optical properties of the film. In certain embodiments, the curing system includes at least one light source in optical communication with an uncured material, a detector for monitoring an optical property of the curing material, and a feedback system for controlling the light emitted from the light source in response to the detector.
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