发明授权
- 专利标题: Systems for curing deposited material using feedback control
- 专利标题(中): 使用反馈控制固化沉积材料的系统
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申请号: US12165892申请日: 2008-07-01
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公开(公告)号: US08463116B2公开(公告)日: 2013-06-11
- 发明人: Edwin Hirahara , David L Lee
- 申请人: Edwin Hirahara , David L Lee
- 申请人地址: US DE Wilmington
- 专利权人: Tap Development Limited Liability Company
- 当前专利权人: Tap Development Limited Liability Company
- 当前专利权人地址: US DE Wilmington
- 代理机构: Christensen O'Connor Johnson Kindness PLLC
- 主分类号: F26B19/00
- IPC分类号: F26B19/00
摘要:
Systems are provided for curing a deposited curable material film using a light source and feedback system for monitoring the degree of curing using detected optical properties of the film. Operational parameters of the light source (e.g., power) are adjusted by a control system in response to the detected optical properties of the film. In certain embodiments, the curing system includes at least one light source in optical communication with an uncured material, a detector for monitoring an optical property of the curing material, and a feedback system for controlling the light emitted from the light source in response to the detector.
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