Invention Grant
- Patent Title: Film forming apparatus and method of forming film
- Patent Title (中): 成膜装置及成膜方法
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Application No.: US12757633Application Date: 2010-04-09
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Publication No.: US08464652B2Publication Date: 2013-06-18
- Inventor: Osamu Kasuga
- Applicant: Osamu Kasuga
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Global IP Counselors, LLP
- Priority: JP2009-101655 20090420
- Main IPC: B05C5/02
- IPC: B05C5/02 ; B41J2/165
Abstract:
A temperature adjustment unit is provided to a chamber for accommodating a stage, a discharge head, and a maintenance device. The temperature adjustment unit adjusts the temperature of the maintenance area at least while the transport device has the discharge head positioned in the maintenance area to be equal to or greater than the temperature of the drawing area while the transport device has the discharge head positioned in the drawing area.
Public/Granted literature
- US20100266777A1 Film forming apparatus and method of forming film Public/Granted day:2010-10-21
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