发明授权
US08466077B2 Sputtering target for forming ZrO2-In2O3 based protective film for optical storage medium
有权
用于形成用于光学存储介质的ZrO2-In2O3基保护膜的溅射靶
- 专利标题: Sputtering target for forming ZrO2-In2O3 based protective film for optical storage medium
- 专利标题(中): 用于形成用于光学存储介质的ZrO2-In2O3基保护膜的溅射靶
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申请号: US12733429申请日: 2008-09-05
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公开(公告)号: US08466077B2公开(公告)日: 2013-06-18
- 发明人: Shoubin Zhang , Akifumi Mishima
- 申请人: Shoubin Zhang , Akifumi Mishima
- 申请人地址: JP Tokyo
- 专利权人: Mitsubishi Material Corporation
- 当前专利权人: Mitsubishi Material Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Edwards Wildman Palmer LLP
- 优先权: JP2007-231670 20070906
- 国际申请: PCT/JP2008/066126 WO 20080905
- 国际公布: WO2009/031670 WO 20090312
- 主分类号: C04B35/486
- IPC分类号: C04B35/486
摘要:
A sputtering target for forming a ZrO2—In2O3 based protective film for an optical storage medium, has a component composition made of ZraInbAcO100-a-b-c where “A” represents one, two, or more of Si, Cr, Al, Ce, Ti, and Sn, “a” represents an amount greater than 5 atomic percent and less than 23 atomic percent, “b” represents an amount greater than 12 atomic percent and less than 35 atomic percent, and “c” represents an amount greater than 0 and less than 30 atomic percent, wherein 90% or more of Zr that is included in the sputtering target for forming the protective film for the optical storage medium is in an oxidative product phase in which Zr and In are combined, and is dispersed in a base material of the target.
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