发明授权
US08467051B2 Widely-tunable semiconductor source integrated in windowed hermetic package
有权
广泛可调的半导体源集成在窗口密封包装中
- 专利标题: Widely-tunable semiconductor source integrated in windowed hermetic package
- 专利标题(中): 广泛可调的半导体源集成在窗口密封包装中
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申请号: US13421012申请日: 2012-03-15
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公开(公告)号: US08467051B2公开(公告)日: 2013-06-18
- 发明人: Dale C. Flanders , Petros Kotidis
- 申请人: Dale C. Flanders , Petros Kotidis
- 申请人地址: US MA Billerica
- 专利权人: Axsun Technologies, Inc.
- 当前专利权人: Axsun Technologies, Inc.
- 当前专利权人地址: US MA Billerica
- 代理机构: Houston & Associates, LLP
- 主分类号: G01J3/00
- IPC分类号: G01J3/00
摘要:
A near infrared (NIR) semiconductor laser system is shown for gas sensing. An embodiment is centered on the use of a system with a much wider tunable laser, which today has a scan band of more than 150 nanometers (nm) to as much as 250 nm or more. In some cases the scan band is about 400 nm or more. This is achieved in the current embodiment through the use of a widely tunable microelectromechanical system (MEMS) based Fabry-Perot filter as an integral part of the laser cavity. Using this technology, these systems are capable of capturing a variety of gases in the any of the well-known spectroscopic scan bands, such as the OH, NH or CH. For example, a single laser with a 250 nm scan band window between 1550-1800 nm can capture ten or as many as twenty hydrocarbon-based gases simultaneously.
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