发明授权
US08470616B2 Patterned assembly for manufacturing a solar cell and a method thereof
有权
用于制造太阳能电池的图案化组件及其方法
- 专利标题： Patterned assembly for manufacturing a solar cell and a method thereof
- 专利标题（中）： 用于制造太阳能电池的图案化组件及其方法
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申请号： US13529702申请日： 2012-06-21
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公开(公告)号： US08470616B2公开(公告)日： 2013-06-25
- 发明人: Paul Sullivan , Peter Nunan , Steven R. Walther
- 申请人： Paul Sullivan , Peter Nunan , Steven R. Walther
- 申请人地址： US MA Gloucester
- 专利权人： Varian Semiconductor Equipment Associates, Inc.
- 当前专利权人： Varian Semiconductor Equipment Associates, Inc.
- 当前专利权人地址： US MA Gloucester
- 主分类号： H01L21/00
- IPC分类号： H01L21/00 ; G01T1/36
摘要：
Apparatuses and methods for manufacturing a solar cell are disclosed. In a particular embodiment, the solar cell may be manufactured by disposing a solar cell in a chamber having a particle source; disposing a patterned assembly comprising an aperture and an assembly segment between the particle source and the solar cell; and selectively implanting first type dopants traveling through the aperture into a first region of the solar cell while minimizing introduction of the first type dopants into a region outside of the first region.
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