发明授权
- 专利标题: Double-sided integrated circuit chips
- 专利标题(中): 双面集成电路芯片
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申请号: US13192608申请日: 2011-07-28
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公开(公告)号: US08471306B2公开(公告)日: 2013-06-25
- 发明人: Kerry Bernstein , Timothy Dalton , Jeffrey Peter Gambino , Mark David Jaffe , Paul David Kartschoke , Stephen Ellinwood Luce , Anthony Kendall Stamper
- 申请人: Kerry Bernstein , Timothy Dalton , Jeffrey Peter Gambino , Mark David Jaffe , Paul David Kartschoke , Stephen Ellinwood Luce , Anthony Kendall Stamper
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Schmeiser, Olsen & Watts
- 代理商 Richard M. Kotulak
- 主分类号: H01L29/80
- IPC分类号: H01L29/80 ; H01L29/04 ; H01L31/036
摘要:
A double-sided integrated circuit chips, methods of fabricating the double-sided integrated circuit chips and design structures for double-sided integrated circuit chips. The method includes removing the backside silicon from two silicon-on-insulator wafers having devices fabricated therein and bonding them back to back utilizing the buried oxide layers. Contacts are then formed in the upper wafer to devices in the lower wafer and wiring levels are formed on the upper wafer. The lower wafer may include wiring levels. The lower wafer may include landing pads for the contacts. Contacts to the silicon layer of the lower wafer may be silicided.
公开/授权文献
- US20110302542A1 DOUBLE-SIDED INTEGRATED CIRCUIT CHIPS 公开/授权日:2011-12-08
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