Invention Grant
- Patent Title: Dopant profile measurement module, method and apparatus
- Patent Title (中): 掺杂分布测量模块，方法和装置
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Application No.: US12749833Application Date: 2010-03-30
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Publication No.: US08471580B2Publication Date: 2013-06-25
- Inventor: Hassan Tanbakuchi , Roger B. Stancliff , Timothy M. Graham , Wenhai Han
- Applicant: Hassan Tanbakuchi , Roger B. Stancliff , Timothy M. Graham , Wenhai Han
- Applicant Address: US CA Santa Clara
- Assignee: Agilent Technologies, Inc.
- Current Assignee: Agilent Technologies, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: G01R31/302
- IPC: G01R31/302
Abstract:
An apparatus comprises: a first signal source; a dopant profile measurement module (DPPM) configured to receive a portion of the signal from the signal source; a probe tip connected to the reflective coupler; a load connected in parallel with the probe tip; and a second signal source connected to a load, wherein the signal source is configured to provide an amplitude-modulated (AM) signal to the probe tip. A method is also described.
Public/Granted literature
- US20100244870A1 DOPANT PROFILE MEASUREMENT MODULE, METHOD AND APPARATUS Public/Granted day:2010-09-30
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