Invention Grant
- Patent Title: Method for compensating for quadrature
- Patent Title (中): 补偿正交的方法
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Application No.: US12645010Application Date: 2009-12-22
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Publication No.: US08479555B2Publication Date: 2013-07-09
- Inventor: Johannes Classen , Christoph Gauger
- Applicant: Johannes Classen , Christoph Gauger
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102009000475 20090129
- Main IPC: G01P21/00
- IPC: G01P21/00

Abstract:
A method for compensating for the quadrature of a micromechanical structure, the micromechanical structure having a substrate having a main extension plane, a seismic mass that is attached by spring elements to the substrate, and first and second compensation electrodes anchored to the substrate; in response to application of a first quadrature voltage between the first compensation electrode and the seismic mass, a first compensation force being produced on the seismic mass and, in response to application of a second quadrature voltage between the second compensation electrode and the seismic mass, a second compensation force being produced on the seismic mass and, in addition, the second quadrature voltage being adjusted as a function of the first quadrature voltage.
Public/Granted literature
- US20110153251A1 METHOD FOR COMPENSATING FOR QUADRATURE Public/Granted day:2011-06-23
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