发明授权
- 专利标题： Micro scale mechanical rate sensors
- 专利标题（中）： 微型机械速率传感器
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申请号： US12871912申请日： 2010-08-31
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公开(公告)号： US08479574B2公开(公告)日： 2013-07-09
- 发明人: Viacheslav Krylov , David Schreiber , Yosi Shacham-Diamand
- 申请人： Viacheslav Krylov , David Schreiber , Yosi Shacham-Diamand
- 申请人地址： IL Tel Aviv
- 专利权人： Ramot at Tel-Aviv University Ltd.
- 当前专利权人： Ramot at Tel-Aviv University Ltd.
- 当前专利权人地址： IL Tel Aviv
- 代理机构： Browdy and Neimark, PLLC
- 主分类号： G01C19/56
- IPC分类号： G01C19/56
摘要：
An angular rate sensor device is presented. The sensor device comprises a disk-shaped structure having a proof mass region and a flexible portion. The disk-like structure is coupled to a substrate in a manner enabling a wave type precession motion such that during the wave type precession motion each material point of the proof mass performs elliptic motion.
公开/授权文献
- US20110048130A1 Micro Scale Mechanical Rate Sensors 公开/授权日：2011-03-03
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