发明授权
- 专利标题： Method of treating gas
- 专利标题（中）： 处理气体的方法
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申请号： US12084361申请日： 2006-09-28
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公开(公告)号： US08480861B2公开(公告)日： 2013-07-09
- 发明人: James Robert Smith , Marilena Radoiu , Stephen John Coles
- 申请人： James Robert Smith , Marilena Radoiu , Stephen John Coles
- 申请人地址： GB Crawley, West Sussex
- 专利权人： Edwards Limited
- 当前专利权人： Edwards Limited
- 当前专利权人地址： GB Crawley, West Sussex
- 优先权： GB0521944.9 20051027
- 国际申请： PCT/GB2006/003597 WO 20060928
- 国际公布： WO2007/048995 WO 20070503
- 主分类号： B01D53/00
- IPC分类号： B01D53/00 ; B01J19/08
摘要：
In a method of treating a gas exhausted from a process chamber, the exhaust gas is conveyed to a vacuum pump (20) and a nitrogen purge gas is added to the exhaust gas for pumping with the exhaust gas. Gas exhaust from the pump is conveyed to an abatement device (28) for abating the exhaust gas. The amount of purge gas added to the exhaust gas is adjusted in response to a variation of the composition of the exhaust gas, or the composition of the gas supplied to the process chamber, to optimise the abatement of the exhaust gas.
公开/授权文献
- US20100071548A1 Method of Treating Gas 公开/授权日：2010-03-25
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