发明授权
US08482357B2 Transverse acoustic wave resonator, oscillator having the resonator and method for making the resonator 有权
横波声波谐振器,具有谐振器的振荡器和用于制造谐振器的方法

Transverse acoustic wave resonator, oscillator having the resonator and method for making the resonator
摘要:
A transverse acoustic wave resonator includes a base, a resonator component, a number of driving electrodes fixed to the base and a number of fixing portions connecting the base and the resonator component. The resonator component is suspended above a top surface of the base and is perpendicular to the base. The driving electrodes are coupling to side surfaces of the resonator component. The resonator component is formed in a shape of an essential regular polygon. The driving electrodes and the resonator component jointly form an electromechanical coupling system for converting capacitance into electrostatic force. Besides, a capacitive-type transverse extension acoustic wave silicon oscillator includes the transverse acoustic wave resonator and a method of fabricating the transverse acoustic wave resonator are also disclosed.
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