发明授权
US08482357B2 Transverse acoustic wave resonator, oscillator having the resonator and method for making the resonator
有权
横波声波谐振器,具有谐振器的振荡器和用于制造谐振器的方法
- 专利标题: Transverse acoustic wave resonator, oscillator having the resonator and method for making the resonator
- 专利标题(中): 横波声波谐振器,具有谐振器的振荡器和用于制造谐振器的方法
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申请号: US13310687申请日: 2011-12-02
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公开(公告)号: US08482357B2公开(公告)日: 2013-07-09
- 发明人: Bin Xiao , Ping Lv , Wei Hu , Jia-Xin Mei , Gang Li
- 申请人: Bin Xiao , Ping Lv , Wei Hu , Jia-Xin Mei , Gang Li
- 申请人地址: CN Suzhou, Jiangsu Province
- 专利权人: Memsensing Microsystems Technology Co., Ltd
- 当前专利权人: Memsensing Microsystems Technology Co., Ltd
- 当前专利权人地址: CN Suzhou, Jiangsu Province
- 代理商 Cheng-Ju Chiang
- 优先权: CN201110308012 20111012
- 主分类号: H03B5/18
- IPC分类号: H03B5/18
摘要:
A transverse acoustic wave resonator includes a base, a resonator component, a number of driving electrodes fixed to the base and a number of fixing portions connecting the base and the resonator component. The resonator component is suspended above a top surface of the base and is perpendicular to the base. The driving electrodes are coupling to side surfaces of the resonator component. The resonator component is formed in a shape of an essential regular polygon. The driving electrodes and the resonator component jointly form an electromechanical coupling system for converting capacitance into electrostatic force. Besides, a capacitive-type transverse extension acoustic wave silicon oscillator includes the transverse acoustic wave resonator and a method of fabricating the transverse acoustic wave resonator are also disclosed.
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