发明授权
US08483523B2 Optical waveguide electro-optic device and process of manufacturing optical waveguide electro-optic device 有权
光波导电光器件及制造光波导光电器件的工艺

Optical waveguide electro-optic device and process of manufacturing optical waveguide electro-optic device
摘要:
An optical waveguide electro-optic device including: a support substrate; an optical waveguide which has a core layer formed of a ferroelectric material, and is formed on an upper side of the support substrate; a lower electrode layer formed on a lower side of the core layer and which is adhered to the support substrate through an adhesion layer; an upper electrode layer formed on an upper side of the core layer; and an external electrode part, wherein the optical waveguide has an incidence plane from where light enters and an outgoing plane from where the light exits, the core layer has a polarization inversion region and a polarization non-inversion region, the upper electrode layer has a plane in such a shape that a width of the plane expands from a side of the incidence plane toward a side of the outgoing plane, to cover the polarization inversion region of the core layer, and the lower electrode layer is connected electrically to the external electrode part on the side of the incidence plane.
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