发明授权
- 专利标题： Microprobe, measurement system and method
- 专利标题（中）： 微探针，测量系统及方法
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申请号： US12742813申请日： 2008-11-17
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公开(公告)号： US08484755B2公开(公告)日： 2013-07-09
- 发明人: Richard Leach , Ben Hughes , Alan Wilson
- 申请人： Richard Leach , Ben Hughes , Alan Wilson
- 申请人地址： GB London
- 专利权人： The Secretary of State for Innovation, Universities and Skills
- 当前专利权人： The Secretary of State for Innovation, Universities and Skills
- 当前专利权人地址： GB London
- 代理机构： Leason Ellis LLP
- 优先权： GB0722477.7 20071115
- 国际申请： PCT/GB2008/003846 WO 20081117
- 国际公布： WO2009/063217 WO 20090522
- 主分类号： G01Q20/00
- IPC分类号： G01Q20/00
摘要：
A microprobe, measurement system and method are disclosed. The microprobe includes a probe tip mounted at a meeting point of a plurality of flexures. The probe tip is moveable upon flexing of one or more of the flexures, each flexure further comprising one or more actuators controllable to flex the flexure and one or more sensors arranged to sense flexing of the flexure.
公开/授权文献
- US20110047661A1 MICROPROBE, MEASUREMENT SYSTEM AND METHOD 公开/授权日：2011-02-24
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