Invention Grant
- Patent Title: Silicon-metal composite micromechanical component and method of manufacturing the same
- Patent Title (中): 硅金属复合微机械部件及其制造方法
-
Application No.: US12743210Application Date: 2008-11-12
-
Publication No.: US08486279B2Publication Date: 2013-07-16
- Inventor: Jean-Charles Fiaccabrino , Marco Verardo , Thierry Conus , Jean-Philippe Thiebaud , Jean-Bernard Peters
- Applicant: Jean-Charles Fiaccabrino , Marco Verardo , Thierry Conus , Jean-Philippe Thiebaud , Jean-Bernard Peters
- Applicant Address: CH Le Locle
- Assignee: Nivarox-FAR S.A.
- Current Assignee: Nivarox-FAR S.A.
- Current Assignee Address: CH Le Locle
- Agency: Griffin & Szipl, P.C.
- Priority: EP07120883 20071116
- International Application: PCT/EP2008/065347 WO 20081112
- International Announcement: WO2009/062943 WO 20090522
- Main IPC: C23F1/00
- IPC: C23F1/00
Abstract:
The invention relates to a method (1) of manufacturing a silicon-metal composite micromechanical component (51) combining DRIE and LIGA processes. The invention also relates to a micromechanical component (51) including a layer wherein one part (53) is made of silicon and another part (41) of metal so as to form a composite micromechanical component (51). The invention concerns the field of timepiece movements.
Public/Granted literature
- US20100243603A1 SILICON-METAL COMPOSITE MICROMECHANICAL COMPONENT AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2010-09-30
Information query
