Invention Grant
- Patent Title: Through-silicon via and method for forming the same
- Patent Title (中): 硅通孔及其形成方法
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Application No.: US13142757Application Date: 2011-04-11
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Publication No.: US08486805B2Publication Date: 2013-07-16
- Inventor: Chao Zhao , Dapeng Chen , Wen Ou
- Applicant: Chao Zhao , Dapeng Chen , Wen Ou
- Applicant Address: CN Beijing
- Assignee: Institute of Microelectronics, Chinese Academy of Sciences
- Current Assignee: Institute of Microelectronics, Chinese Academy of Sciences
- Current Assignee Address: CN Beijing
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: CN201110052134 20110304
- International Application: PCT/CN2011/072593 WO 20110411
- International Announcement: WO2012/119333 WO 20120913
- Main IPC: H01L21/30
- IPC: H01L21/30

Abstract:
A through-silicon via and a method for forming the same are provided. The method includes: providing a semiconductor substrate, the semiconductor substrate including an upper surface and an opposite lower surface; etching the upper surface of the semiconductor substrate to form an opening; filling the opening with a conductive material to form a first nail; etching the lower surface of the semiconductor substrate to form a recess, such that the first nail is exposed at a bottom of the recess; filling the recess with a conductive material that can be etched, and etching the conductive material that can be etched to form a second nail, such that the second nail is vertically connected with the first nail; and filling a gap between the second nail and the semiconductor substrate and a gap between the second nail and an adjacent second nail with a dielectric layer. Then invention can improve the reliability of through-silicon vias and avoid voids.
Public/Granted literature
- US20120223431A1 THROUGH-SILICON VIA AND METHOD FOR FORMING THE SAME Public/Granted day:2012-09-06
Information query
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