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US08487431B2 Semiconductor integrated circuit having a multi-chip structure 有权
具有多芯片结构的半导体集成电路

Semiconductor integrated circuit having a multi-chip structure
Abstract:
A semiconductor integrated circuit having a multi-chip structure includes a plurality of stacked semiconductor chips. At least one of the semiconductor chips includes first and second metal layers separately formed inside the semiconductor chip, a first internal circuit coupled in series between the first and second metal layers inside the semiconductor chip, a first metal path vertically formed over the second metal layer to a first side of the semiconductor chip, and a first through silicon via formed through the semiconductor chip from a second side of the semiconductor chip to the first metal layer.
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