发明授权
- 专利标题： Multi-table lithographic systems, lithography processing tools and methods for processing workpieces
- 专利标题（中）： 多表平版印刷系统，光刻加工工具和加工工件的方法
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申请号： US12704046申请日： 2010-02-11
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公开(公告)号： US08488105B2公开(公告)日： 2013-07-16
- 发明人: Jonas Walther
- 申请人： Jonas Walther
- 申请人地址： SE Taby
- 专利权人： Micronic Mydata AB
- 当前专利权人： Micronic Mydata AB
- 当前专利权人地址： SE Taby
- 代理机构： Harness, Dickey & Pierce, P.L.C.
- 主分类号： G03B27/58
- IPC分类号： G03B27/58 ; G03B27/42
摘要：
A lithographic workpiece processing tool includes a loading area for loading a workpiece; and a processing area for processing a workpiece. The workpiece processing tool further includes a multi-table system arranged between the loading area and the processing area. The multi-table system includes at least two tables configured to pass each other while moving between the loading area and the processing area. Each of the at least two tables is configured to hold a workpiece.
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