Invention Grant
US08491801B1 Method and system for providing an NFT using a sacrificial NFT structure
有权
使用牺牲NFT结构提供NFT的方法和系统
- Patent Title: Method and system for providing an NFT using a sacrificial NFT structure
- Patent Title (中): 使用牺牲NFT结构提供NFT的方法和系统
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Application No.: US13291702Application Date: 2011-11-08
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Publication No.: US08491801B1Publication Date: 2013-07-23
- Inventor: Shawn M. Tanner , Yufeng Hu , Ut Tran , Zhongyan Wang
- Applicant: Shawn M. Tanner , Yufeng Hu , Ut Tran , Zhongyan Wang
- Applicant Address: US CA Fremont
- Assignee: Western Digital (Fremont), LLC
- Current Assignee: Western Digital (Fremont), LLC
- Current Assignee Address: US CA Fremont
- Main IPC: B44C1/22
- IPC: B44C1/22 ; G11B5/127
Abstract:
A method and system provides a near-field transducer (NFT) for an energy assisted magnetic recording (EAMR) transducer. The method and system include forming a sacrificial NFT structure having a shape a location corresponding to the NFT. A dielectric layer is deposited. A portion of the dielectric layer resides on the sacrificial NFT structure. At least this portion of the dielectric layer on the sacrificial structure is removed. The sacrificial NFT structure is removed, exposing an NFT trench in the dielectric layer. At least one conductive layer for the NFT is deposited. A first portion of the conductive layer(s) reside in the NFT trench. A second portion of the conductive layer(s) external to the NFT trench is removed to form the NFT.
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