发明授权
- 专利标题: Apparatus and method for producing trichlorosilane
- 专利标题(中): 用于制备三氯硅烷的设备和方法
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申请号: US12659468申请日: 2010-03-10
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公开(公告)号: US08491862B2公开(公告)日: 2013-07-23
- 发明人: Wataru Saiki , Taner Akbay
- 申请人: Wataru Saiki , Taner Akbay
- 申请人地址: JP Tokyo
- 专利权人: Mitsubishi Materials Corporation
- 当前专利权人: Mitsubishi Materials Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Edwards Wildman Palmer LLP
- 优先权: JP2009-057654 20090311
- 主分类号: C01B33/107
- IPC分类号: C01B33/107
摘要:
An apparatus and a method for producing trichlorosilane are provided, which effectively suppresses the reaction converting trichlorosilane to tetrachlorosilane and the formation of polymers, thereby achieving a high recovery ratio of trichlorosilane. The apparatus for producing trichlorosilane includes: a converter reactor for converting a raw material gas containing tetrachlorosilane and hydrogen into a reaction product gas; a cooler for cooling the reaction product gas fed from the converter reactor; and a plurality of provided in the cooler for spraying cooling liquids. Average droplet diameters of the cooling liquids sprayed from a plurality of the nozzles are different from each other, and a cooling liquids volume sprayed from each of the plurality of nozzles is able to be individually adjusted.
公开/授权文献
- US20100233062A1 Apparatus and method for producing trichlorosilane 公开/授权日:2010-09-16
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