Invention Grant
- Patent Title: Method of manufacturing carbon nanotube device array
- Patent Title (中): 碳纳米管器件阵列的制造方法
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Application No.: US12591771Application Date: 2009-12-01
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Publication No.: US08492076B2Publication Date: 2013-07-23
- Inventor: Un-jeong Kim , Eun-hong Lee , Young-hee Lee , Il-ha Lee
- Applicant: Un-jeong Kim , Eun-hong Lee , Young-hee Lee , Il-ha Lee
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce
- Priority: KR10-2009-0042192 20090514
- Main IPC: D01F9/12
- IPC: D01F9/12
Abstract:
Provided is a method of manufacturing carbon nanotube (CNT) device arrays. In the method of manufacturing CNT device arrays, catalyst patterns may be formed using a photolithography process, CNTs may be grown from the catalyst patterns, and electrodes may be formed on the grown CNTs.
Public/Granted literature
- US20100291486A1 Method of manufacturing carbon nanotube device array Public/Granted day:2010-11-18
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