Invention Grant
- Patent Title: Embedded wafer level optical package structure and manufacturing method
- Patent Title (中): 嵌入式晶圆级光封装结构及制造方法
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Application No.: US13335548Application Date: 2011-12-22
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Publication No.: US08492181B2Publication Date: 2013-07-23
- Inventor: Anandan Ramasamy , KahWee Gan , Hk Looi , David Gani
- Applicant: Anandan Ramasamy , KahWee Gan , Hk Looi , David Gani
- Applicant Address: SG Singapore
- Assignee: STMicroelectronics Pte Ltd.
- Current Assignee: STMicroelectronics Pte Ltd.
- Current Assignee Address: SG Singapore
- Agency: Hogan Lovells US LLP
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method of forming an embedded wafer level optical package includes attaching a sensor die, PCB bars and an LED on adhesive tape laminated on a carrier, attaching a dam between two light sensitive sensors of the sensor die, encapsulating the sensor die, the PCB bars, the LED, and the dam in an encapsulation layer, debonding the carrier, grinding a top surface of the encapsulation layer, forming vias through the encapsulation layer to the sensor die and the LED, filling the vias with conductive material, metalizing the top surface of the encapsulation layer, dielectric coating of the top surface of the encapsulation layer, dielectric coating of a bottom surface of the encapsulation layer, patterning the dielectric coating of the bottom surface of the encapsulation layer, and plating the patterned dielectric coating of the bottom surface of the encapsulation layer.
Public/Granted literature
- US20130164867A1 EMBEDDED WAFER LEVEL OPTICAL PACKAGE STRUCTURE AND MANUFACTURING METHOD Public/Granted day:2013-06-27
Information query
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