发明授权
US08492265B2 Pad bonding employing a self-aligned plated liner for adhesion enhancement
有权
使用自对准电镀衬垫的衬垫粘合剂用于粘附增强
- 专利标题: Pad bonding employing a self-aligned plated liner for adhesion enhancement
- 专利标题(中): 使用自对准电镀衬垫的衬垫粘合剂用于粘附增强
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申请号: US13431254申请日: 2012-03-27
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公开(公告)号: US08492265B2公开(公告)日: 2013-07-23
- 发明人: Chih-Chao Yang , David V. Horak , Takeshi Nogami , Shom Ponoth
- 申请人: Chih-Chao Yang , David V. Horak , Takeshi Nogami , Shom Ponoth
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Scully, Scott, Murphy & Presser, P.C.
- 代理商 Parashes Kalaitzis, Esq.
- 主分类号: H01L21/4763
- IPC分类号: H01L21/4763
摘要:
Two substrates are brought together and placed in a plating bath. In one embodiment, a conductive material is plated in microscopic cavities present at the interface between a first metal pad and a second metal pad to form at least one interfacial plated metal liner portion that adheres to a surface of the first metal pad and a surface of the second metal pad. In another embodiment, at least one metal pad is recessed relative to a dielectric surface before being brought together. The two substrates are placed in a plating bath and a conductive material is plated in the cavity between the first metal pad and the second metal pad to form a contiguous plated metal liner layer that adheres to a surface of the first metal pad and a surface of the second metal pad.