Invention Grant
US08493087B2 Probe card, and apparatus and method for testing semiconductor device using the probe card 有权
探针卡,以及使用探针卡测试半导体器件的装置和方法

Probe card, and apparatus and method for testing semiconductor device using the probe card
Abstract:
A probe card transmitting electrical test signals between a tester and a semiconductor device includes a main circuit board configured to receive and transmit electrical signals from the tester, an interface unit electrically connected to the main circuit board, the interface unit including a signal line and a signal connection terminal, and at least one probe unit connected to the interface unit, the probe unit being detachable and including a plurality of probe needles arranged in a pattern corresponding to a pattern of electrode pads of the semiconductor device.
Information query
Patent Agency Ranking
0/0